JPH0627860Y2 - 回転ムラ補償装置 - Google Patents

回転ムラ補償装置

Info

Publication number
JPH0627860Y2
JPH0627860Y2 JP4532086U JP4532086U JPH0627860Y2 JP H0627860 Y2 JPH0627860 Y2 JP H0627860Y2 JP 4532086 U JP4532086 U JP 4532086U JP 4532086 U JP4532086 U JP 4532086U JP H0627860 Y2 JPH0627860 Y2 JP H0627860Y2
Authority
JP
Japan
Prior art keywords
rotation
unevenness
shaft
position detector
input shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4532086U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62156623U (en]
Inventor
泰秀 永浜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP4532086U priority Critical patent/JPH0627860Y2/ja
Publication of JPS62156623U publication Critical patent/JPS62156623U/ja
Application granted granted Critical
Publication of JPH0627860Y2 publication Critical patent/JPH0627860Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Retarders (AREA)
  • Control Of Velocity Or Acceleration (AREA)
JP4532086U 1986-03-27 1986-03-27 回転ムラ補償装置 Expired - Lifetime JPH0627860Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4532086U JPH0627860Y2 (ja) 1986-03-27 1986-03-27 回転ムラ補償装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4532086U JPH0627860Y2 (ja) 1986-03-27 1986-03-27 回転ムラ補償装置

Publications (2)

Publication Number Publication Date
JPS62156623U JPS62156623U (en]) 1987-10-05
JPH0627860Y2 true JPH0627860Y2 (ja) 1994-07-27

Family

ID=30863951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4532086U Expired - Lifetime JPH0627860Y2 (ja) 1986-03-27 1986-03-27 回転ムラ補償装置

Country Status (1)

Country Link
JP (1) JPH0627860Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6450755B1 (en) * 1998-07-10 2002-09-17 Equipe Technologies Dual arm substrate handling robot with a batch loader

Also Published As

Publication number Publication date
JPS62156623U (en]) 1987-10-05

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